產(chǎn)品詳情
AM 839-101612-887 半導(dǎo)體
LAM 839-101612-887 是靜電吸盤(pán) (ESC) 部件,用于 LAM Research Corporation 生產(chǎn)的半導(dǎo)體晶片蝕刻和灰化設(shè)備。它是半導(dǎo)體制造過(guò)程中的一個(gè)關(guān)鍵部件,可確保在蝕刻和灰化步驟中晶片被牢牢固定并正確對(duì)齊。
產(chǎn)品概述
產(chǎn)品名稱: LAM 839-101612-887
產(chǎn)品類型: 靜電卡盤(pán) (ESC) 元件
產(chǎn)品品牌: LAM Research Corporation LAM Research Corporation
產(chǎn)品制造商: LAM Research Corporation LAM Research Corporation
產(chǎn)品參數(shù)
零件編號(hào): 839-101612-887
卡盤(pán)尺寸: 200mm
電壓范圍: 0-1000V 0-1000V
電流容量: 10A
真空兼容性 是
冷卻劑兼容性 是
應(yīng)用領(lǐng)域
半導(dǎo)體晶片蝕刻
半導(dǎo)體晶片灰化
產(chǎn)品特點(diǎn)
高夾持力,可安全夾持晶片
均勻的靜電場(chǎng)可實(shí)現(xiàn)精確的晶片對(duì)準(zhǔn)
顆粒生成量低,可實(shí)現(xiàn)清潔處理
與各種蝕刻和灰化化學(xué)試劑兼容
結(jié)構(gòu)耐用,使用壽命長(zhǎng)
產(chǎn)品優(yōu)勢(shì)
提高晶片蝕刻和灰化工藝性能
提高晶片產(chǎn)量和產(chǎn)品質(zhì)量
減少工藝缺陷和顆粒污染
降低運(yùn)營(yíng)成本和維護(hù)費(fèi)用
產(chǎn)品選擇
選擇合適的 LAM 839-101612-887 ESC 組件取決于特定的蝕刻和灰化應(yīng)用、晶片尺寸和設(shè)備配置。需要考慮的因素包括
晶片尺寸和材料
蝕刻和灰化工藝參數(shù)
PM50CS1E060 MDS-D-CV-110 839-101612-887
PM50CS1E060 MDS-D-CV-110 839-101612-887
PM50CS1E060
MDS-D-CV-110
A06B-0034-B175#0008 MG/ATC軸電機(jī)
839-101612-887
719-101612-885
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