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HEIDENHAIN-0382


3970 0050-25199 GAS LINE, VENT CH D W/B MID, MIX
3971 0050-70075 GAS LINE #3,CH D, HEATER, WB, CHMBR SIDE
3972 0050-20352 GAS LINE, HEATER MIDDLE bbbbbbbb'D' PVD
3973 0050-70079 GAS LINE #1, CH D, HEATER, MFC 8
3974 0050-20130 GASLINE COOLDOWN #1
3975 0050-20131 GASLINE COOLDOWN #2
3976 0050-76106 GASLINE, COOLDOWN AT CH A, LINE #3
3977 0050-76030 WB HTR AR GASLINE, MIX
3978 0040-39566 LIFT PLATE
3979 0020-22263 ADAPTER PVD WATER LINES ON BOARD CRYO
3980 0020-21035 BRACKET SOURCE WATER LINE
3981 0020-29311 SPACER, SOURCE GUIDE PIN, VECTRA IMP
3982 0020-24263 6" Shutter Blade
3983 15-100263-00 ROBOT BLADE 200MM HI PURI
3984 15-10899-00 SPRING SEAL PLATE
3985 0040-99952 AMAT 6INCH Polymide ESC (OXIDE)
3986 0090-20105 SSY SENSOR WAFER SM312C V2
3987 0520-01010 SEAL vatseal Rectangular
3988 0020-24018 PIN ANTENNA PC II POLI SI
3989 0020-21734 PIN, GUIDE
3990 3690-02269 SCR SET 10-24 X 7/8L HEX SKT SST FLT POINT
3991 0020-20522 WSHR,INSULATOR LIFTER
3992 3870-01249 VALVE FINE MTR 1/R VCR STRAIGHT SST
3993 0190-20015 GAS LINE NO 3 PRECLEAN CHMBR (REACTIVE P
3994 0050-24082 FEED THROUGH INSULATOR GAS LINE
3995 0150-38348 HARMONIX CABLE FILTER
3996 0100-20064 PCB ASSY,SBC I/O BREAKOUT
3997 0200-20522 WAHR, INSULATOR LIFTER
3998 0090-20300 LID SENSOR
3999 0140-21107 HARNESS, SMIF I/F, CASSETTE IN PLACE
4000 0100-20143 PCB ASSY L LOCK WAFER SENSOR
4001 0020-20123 HEATER, ISOLATOR CERAMIC
4002 0200-18053 Lift Pin Guide
4003 0010-13624 IMP Adapter Assy sith Feedthru
4004 0020-23093 WASHER INSULATOR FOR PVD LIFTER
4005 0020-26254 INSULATOR CERAMIC DURASOURCE TTN
4006 0050-21187 Gasline, Heater Ar, WB Shutter, 5RA
4007 0150-20708 CABLE ASSY 75' DC SOURCE DML
4008 3780-01130 SPR GAS 7 88 STROKE120LB
4009 3870-01120 VALVE PNEU 1-1/4 IN 2-WAY NCNKLPLW/DISCGLOBE SER
4010 0150-04642 CABLE ASSY, 2-PHASE DRIVER SIGNAL I/F 75
4011 0050-21703 GASLINE CH 1 LOWER VENT (W/CH C), MIX FT
4012 0050-76673 CASLINE STD/WB CH C VENT (W/CH1),MIX
4013 0050-21776 CASLINE STD/WC CH C VENT, MIX FTGS
4014 0140-21803 HARNESS ASSY, WATER FLOW CH C OR D
4015 15-110411-00 bbbbbb Sapphire
4016 17-110412-00 Screen ,RF Shield , Etched Short
4017 02-141319-00 Heater ISO BOX, NEW TYPE
4018 C2 Dual Sequal Novellus C2 Dual Sequal RF Clean Kit
4019 04-136579-00 RF Switch Kit, SEQUEL-X(SPML KIT)
4020 02-139347-00 Relay RF Switch
4021 02-139348-00 Control Assy RF switch
4022 22-026373-00 Filter male inlet, female outlet(M/F VCR 1/4")
4023 27-277312-00 Controller over temp type-J
4024 15-00043-02 PLATE, ADJUSTER CERAMIC GAS
4025 17-113692-00 Bracket strap side RF Dis
4026 34-103697-00 Relay SSR, 280AC,12A,3-30VDC
4027 10-00095-00 Manifold Gas tube
4028 16-00098-00 Wire, Insulated, Ceramic Bead,Long
4029 05-140758-00 HVA Gate Valve used (With Heater Jacket)
4030 16-033732-00 Manifold 4in Vaccum/Bulkhead
4031 16-041993-00 Special 4in Vaccum W/HYT Port
4032 03-10361-00 N2/VAC INTERLOCK 72FT
4033 03-10794-01 R F Interlock 25FT
4034 03-033871-01 rf GENERATOR 45FT
4035 03-114682-03 Novellus Cable
4036 38-128003-00 Novellus Cable
4037 20-00221-00 WASHER, FLAT #8 ALUM
4038 15-119059-00 SCRW SKT HEX 1/4-20X 25,NICKL
4039 20-00222-00 WASHER FLAT, 1/4 ALUN
4040 19-00056-00 Feedthru Assy, Heater
4041 27-10114-00 Feedthru Assembly heater
4042 15-00399-02 Serw HEX 8-32X 96 NICKEL
4043 15-053394-02 FORK FINGER Minimum contact
4044 22-00006-00 Filter waferguard
4045 03-123072-00 Interlock B/D SEQ-X
4046 22-00090-00 Filter waferguard
4047 15-00558-01 Sleeve Heater Lead 2 " Ceramic
4048 27-034083-01 Actulator, Hoist
4049 27-00010-01 TC,TYPE'J',RIGID,1/8 DIA x 12L OMEGA
4050 27-00127-00 Thermocouple Type E LG
4051 15-033485-00 Insert, MESC Port, Inigner
4052 02-00205-00 TCF feedthrough
4053 17-103987-00 Strap RF
4054 05-164943-00 Assy 4-shelf CAST COOL STATION
4055 17-158968-00 Racket, V23, V46A Security
4056 03-00313-04 CABLE ASSY,CA102-4
4057 22-00656-00 O-ring, 7 474 x 0 139, (2-264 Kalrez)
4058 27-00117-01 CNTRLR,TEMP,'E' TYPE INVENSYS
4059 22-00053-00 O-ring, 0 676 x 0 070, Viton
4060 22-00174-00 O-ring, 6 234 x 0 139, Exhaust Box, Viton
4061 22-00239-00 O-ring, 5 984 x 0 139, Viton
4062 22-00345-00 O-ring, 3/8 OD Tube QC F
4063 22-00021-01 O-ring, 1 984 x 0 139, Buna
4064 22-00391-00 O-ring, 0 864 x 0 070, Viton
4065 22-00344-00 O-ring, 0 364 x 0 070, Viton
4066 22-00361-00 O-ring, 31 12 x 0 275, Viton
4067 22-00236-00 O-ring, 7 475 x 0 275, Viton
4068 60-00019-00 Seal Assy NW25
4069 60-00026-00 Seal Assy NW100
4070 60-00039-00 Seal Assy NW40
4071 22-10018-00 O-ring, 15 955 x 0 210, Face Plate
4072 22-00042-00 O-ring, 7 984 x 0 139
4073 22-10117-00 O-ring, 7 234 x 0 139, Valve Seat

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